Thermometers dedicated to semiconductor equipment (Photrix)

In semiconductor manufacturing equipment, vacuum equipment is the mainstay to generate plasma and improve the quality of reactions. Because of the vacuum environment, there are various restrictions on the use of contact-type thermometers, such as the need to provide a structure that is compatible with the vacuum and the need to maintain a clean atmosphere, which makes some parts unusable.
Our fiber type light pipe radiation thermometer can be used for vacuum equipment.

Features

Our thermometer dedicated to semiconductor equipment (Photrix) uses a light pipe made of quartz or sapphire, which can be installed near the object in the vacuum equipment to measure temperature.
While maintenance of the window glass is required for the normal window glass, the light pipe type of this product is maintenance-free and can easily measure temperatures. Fiber-optic radiation thermometers through window glass are also available.

Thermometers dedicated to semiconductor equipment Series
(Left) Lens type (Right) Light pipe type