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COMPANY PROFILE
PRODUCT
Thermocouples
Resistance temperature detectors
Accessories for temperature sensors
Special sensors
• Special sensors
• For Iron steel
• For LNG Tank
• For Other Applications
• For Petrochemical
• For Power generation
• For Semiconductor
• Thermal Power Plant
Microheaters
Other products
Temperature calibration service
Traceability service
Contact


Head Office:

Yamari Industries,Limited
5-4,1-Chome,Mishimae,Takatsuki-Shi 569-0835,Osaka Japan
Tel: +81-72 678 3453  - Fax: +81-72 678 3516
 
Yamari Vietnam Hanoi Office:
No 9, 651/82/3 Minh Khai street- Hai Ba Trung Dist. Hanoi Vietnam
Tel: 0989.649.965 - Fax: +8424 36370053
Email:  sales@yamari.com.vn

Yamari Vietnam HCM Office:
106  Nguyen Van Troi, Phu Nhuan District, Tp HCM
Tel: 0989.649.965
Email:  sales@yamari.com.vn

 

For Semiconductor
■ Profile Thermocuples for Diffusion Systems


 - Features -

    ◆ Accuracy
     Class2(Class 1 is also available as an option.)     
     Calibration certificate shall be issued at temperature range and interval requested.

   ◆ Stability  
     The construction and material that enhance stability shall be applied.
     E.g.・Longer insulating tube capable of reducing evaporation of rhodium element.
      ・Alumina insulating tube containing low ferrous impurities.
      ・Quartz protecting tube containing low alkali or high purity silicon carbide
       protecting tube.

   ◆ Cleanness
     The profile thermocouples shall be assembled in clean room.(Cleanliness:Class 5)

   ◆ Application
     In addition to basic structure,various connecting methods like connection to lead
     wire are also applicable.

  ■ Wafer Sensor
This wafer sensor was developed to accurately reproduce the temperature profile of silicon wafers in wafer processing equipment. Users have now challenging us to further improve its quality by achieving a reproducibility of 0.1℃.
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