Work Office: No 9, 651/82/3 Minh Khai street- Hai Ba Trung Dist. Hanoi Vietnam Add: No.08, Group 20, Phuc Loi Ward, Long Bien District, Ha Noi, Vietnam Tel: 0989.649.965 - Fax: +8424 36370053 Email: firstname.lastname@example.org
◆ Accuracy Class2(Class 1 is also available as an option.) Calibration certificate shall be issued at temperature range and interval requested.
◆ Stability The construction and material that enhance stability shall be applied. E.g.・Longer insulating tube capable of reducing evaporation of rhodium element. ・Alumina insulating tube containing low ferrous impurities. ・Quartz protecting tube containing low alkali or high purity silicon carbide protecting tube.
◆ Cleanness The profile thermocouples shall be assembled in clean room.(Cleanliness:Class 5)
◆ Application In addition to basic structure,various connecting methods like connection to lead wire are also applicable.
■ Wafer Sensor
This wafer sensor was developed to accurately reproduce the temperature profile of silicon wafers in wafer processing equipment. Users have now challenging us to further improve its quality by achieving a reproducibility of 0.1℃.